12/2/2011	12:40:30 AM	Helium valve closed
12/2/2011	12:40:30 AM	BCl3 valve closed
12/2/2011	12:40:30 AM	PH3 valve closed
12/2/2011	12:40:30 AM	SiCl4 pre valve closed
12/2/2011	12:40:30 AM	SiCl4 post valve closed
12/2/2011	12:40:30 AM	Main Vac valve closed
12/2/2011	12:40:30 AM	Bypass valve closed
12/2/2011	12:40:30 AM	Bubbler valve closed
12/2/2011	12:40:30 AM	H2 valve opened
12/2/2011	12:40:30 AM	Helium MFC set to  0.000000
12/2/2011	12:40:30 AM	H2 MFC set to  500.000000
12/2/2011	12:40:30 AM	BCl3 MFC set to  0.000000
12/2/2011	12:40:30 AM	PHl3 MFC set to  0.000000
12/2/2011	12:40:30 AM	SiCl4 MFC set to  0.000000
12/2/2011	12:40:30 AM	Bypass solenoid MFC set to  0.000000
12/2/2011	12:40:30 AM	Tube furnace set to 0
12/2/2011	12:41:38 AM	Helium valve closed
12/2/2011	12:41:38 AM	BCl3 valve closed
12/2/2011	12:41:38 AM	PH3 valve closed
12/2/2011	12:41:38 AM	SiCl4 pre valve closed
12/2/2011	12:41:38 AM	SiCl4 post valve closed
12/2/2011	12:41:38 AM	Main Vac valve closed
12/2/2011	12:41:38 AM	Bypass valve closed
12/2/2011	12:41:38 AM	H2 valve opened
12/2/2011	12:41:38 AM	Bubbler valve opened
12/2/2011	12:41:38 AM	Helium MFC set to  0.000000
12/2/2011	12:41:38 AM	H2 MFC set to  500.000000
12/2/2011	12:41:38 AM	BCl3 MFC set to  0.000000
12/2/2011	12:41:38 AM	PHl3 MFC set to  0.000000
12/2/2011	12:41:38 AM	SiCl4 MFC set to  0.000000
12/2/2011	12:41:38 AM	Bypass solenoid MFC set to  0.000000
12/2/2011	12:41:38 AM	Tube furnace set to 0
12/2/2011	12:41:39 AM	Helium valve closed
12/2/2011	12:41:39 AM	BCl3 valve closed
12/2/2011	12:41:39 AM	PH3 valve closed
12/2/2011	12:41:39 AM	SiCl4 pre valve closed
12/2/2011	12:41:39 AM	SiCl4 post valve closed
12/2/2011	12:41:39 AM	Main Vac valve closed
12/2/2011	12:41:39 AM	Bypass valve closed
12/2/2011	12:41:39 AM	H2 valve opened
12/2/2011	12:41:39 AM	Bubbler valve opened
12/2/2011	12:41:39 AM	Helium MFC set to  0.000000
12/2/2011	12:41:39 AM	H2 MFC set to  500.000000
12/2/2011	12:41:39 AM	BCl3 MFC set to  0.000000
12/2/2011	12:41:39 AM	PHl3 MFC set to  0.000000
12/2/2011	12:41:39 AM	SiCl4 MFC set to  0.000000
12/2/2011	12:41:39 AM	Bypass solenoid MFC set to  0.000000
12/2/2011	12:41:39 AM	Tube furnace set to 1000
12/2/2011	1:06:39 AM	Helium valve closed
12/2/2011	1:06:39 AM	PH3 valve closed
12/2/2011	1:06:39 AM	Main Vac valve closed
12/2/2011	1:06:39 AM	Bypass valve closed
12/2/2011	1:06:39 AM	H2 valve opened
12/2/2011	1:06:39 AM	BCl3 valve opened
12/2/2011	1:06:39 AM	SiCl4 pre valve opened
12/2/2011	1:06:39 AM	SiCl4 post valve opened
12/2/2011	1:06:39 AM	Bubbler valve opened
12/2/2011	1:06:39 AM	Helium MFC set to  0.000000
12/2/2011	1:06:39 AM	H2 MFC set to  450.000000
12/2/2011	1:06:39 AM	BCl3 MFC set to  1.000000
12/2/2011	1:06:39 AM	PHl3 MFC set to  0.000000
12/2/2011	1:06:39 AM	SiCl4 MFC set to  50.000000
12/2/2011	1:06:39 AM	Bypass solenoid MFC set to  0.000000
12/2/2011	1:06:39 AM	Tube furnace set to 1000
12/2/2011	1:39:39 AM	Helium valve closed
12/2/2011	1:39:39 AM	BCl3 valve closed
12/2/2011	1:39:39 AM	PH3 valve closed
12/2/2011	1:39:39 AM	SiCl4 pre valve closed
12/2/2011	1:39:39 AM	SiCl4 post valve closed
12/2/2011	1:39:39 AM	Main Vac valve closed
12/2/2011	1:39:39 AM	Bypass valve closed
12/2/2011	1:39:39 AM	H2 valve opened
12/2/2011	1:39:39 AM	Bubbler valve opened
12/2/2011	1:39:39 AM	Helium MFC set to  0.000000
12/2/2011	1:39:39 AM	H2 MFC set to  500.000000
12/2/2011	1:39:39 AM	BCl3 MFC set to  0.000000
12/2/2011	1:39:39 AM	PHl3 MFC set to  0.000000
12/2/2011	1:39:39 AM	SiCl4 MFC set to  0.000000
12/2/2011	1:39:39 AM	Bypass solenoid MFC set to  0.000000
12/2/2011	1:39:39 AM	Tube furnace set to 750
12/2/2011	1:54:39 AM	H2 valve closed
12/2/2011	1:54:39 AM	BCl3 valve closed
12/2/2011	1:54:39 AM	PH3 valve closed
12/2/2011	1:54:39 AM	SiCl4 pre valve closed
12/2/2011	1:54:39 AM	SiCl4 post valve closed
12/2/2011	1:54:39 AM	Main Vac valve closed
12/2/2011	1:54:39 AM	Bypass valve closed
12/2/2011	1:54:39 AM	Helium valve opened
12/2/2011	1:54:39 AM	Bubbler valve opened
12/2/2011	1:54:39 AM	Helium MFC set to  500.000000
12/2/2011	1:54:39 AM	H2 MFC set to  0.000000
12/2/2011	1:54:39 AM	BCl3 MFC set to  0.000000
12/2/2011	1:54:39 AM	PHl3 MFC set to  0.000000
12/2/2011	1:54:39 AM	SiCl4 MFC set to  0.000000
12/2/2011	1:54:39 AM	Bypass solenoid MFC set to  0.000000
12/2/2011	1:54:39 AM	Tube furnace set to 0
12/2/2011	2:14:39 AM	Helium valve closed
12/2/2011	2:14:39 AM	H2 valve closed
12/2/2011	2:14:39 AM	BCl3 valve closed
12/2/2011	2:14:39 AM	PH3 valve closed
12/2/2011	2:14:39 AM	SiCl4 pre valve closed
12/2/2011	2:14:39 AM	SiCl4 post valve closed
12/2/2011	2:14:39 AM	Main Vac valve closed
12/2/2011	2:14:39 AM	Bypass valve closed
12/2/2011	2:14:39 AM	Bubbler valve closed
12/2/2011	2:14:39 AM	Helium MFC set to  0.000000
12/2/2011	2:14:39 AM	H2 MFC set to  0.000000
12/2/2011	2:14:39 AM	BCl3 MFC set to  0.000000
12/2/2011	2:14:39 AM	PHl3 MFC set to  0.000000
12/2/2011	2:14:39 AM	SiCl4 MFC set to  0.000000
12/2/2011	2:14:39 AM	Bypass solenoid MFC set to  0.000000
12/2/2011	2:14:40 AM	Tube furnace set to 0
12/2/2011	2:34:40 AM	Helium valve closed
12/2/2011	2:34:40 AM	H2 valve closed
12/2/2011	2:34:40 AM	BCl3 valve closed
12/2/2011	2:34:40 AM	PH3 valve closed
12/2/2011	2:34:40 AM	SiCl4 pre valve closed
12/2/2011	2:34:40 AM	SiCl4 post valve closed
12/2/2011	2:34:40 AM	Main Vac valve closed
12/2/2011	2:34:40 AM	Bubbler valve closed
12/2/2011	2:34:40 AM	Bypass valve opened
12/2/2011	2:34:40 AM	Helium MFC set to  0.000000
12/2/2011	2:34:40 AM	H2 MFC set to  0.000000
12/2/2011	2:34:40 AM	BCl3 MFC set to  0.000000
12/2/2011	2:34:40 AM	PHl3 MFC set to  0.000000
12/2/2011	2:34:40 AM	SiCl4 MFC set to  0.000000
12/2/2011	2:34:40 AM	Bypass solenoid MFC set to  0.000000
12/2/2011	2:34:40 AM	Tube furnace set to 0
12/2/2011	2:36:15 AM	Helium valve closed
12/2/2011	2:36:15 AM	H2 valve closed
12/2/2011	2:36:15 AM	BCl3 valve closed
12/2/2011	2:36:15 AM	PH3 valve closed
12/2/2011	2:36:15 AM	SiCl4 pre valve closed
12/2/2011	2:36:15 AM	SiCl4 post valve closed
12/2/2011	2:36:15 AM	Main Vac valve closed
12/2/2011	2:36:15 AM	Bubbler valve closed
12/2/2011	2:36:15 AM	Bypass valve opened
12/2/2011	2:36:15 AM	Helium MFC set to  0.000000
12/2/2011	2:36:15 AM	H2 MFC set to  0.000000
12/2/2011	2:36:15 AM	BCl3 MFC set to  0.000000
12/2/2011	2:36:15 AM	PHl3 MFC set to  0.000000
12/2/2011	2:36:15 AM	SiCl4 MFC set to  0.000000
12/2/2011	2:36:15 AM	Bypass solenoid MFC set to  0.000000
12/2/2011	2:36:15 AM	Tube furnace set to 0
12/2/2011	2:37:15 AM	Helium valve closed
12/2/2011	2:37:15 AM	H2 valve closed
12/2/2011	2:37:15 AM	BCl3 valve closed
12/2/2011	2:37:15 AM	PH3 valve closed
12/2/2011	2:37:15 AM	SiCl4 pre valve closed
12/2/2011	2:37:15 AM	SiCl4 post valve closed
12/2/2011	2:37:15 AM	Bypass valve closed
12/2/2011	2:37:15 AM	Bubbler valve closed
12/2/2011	2:37:15 AM	Main Vac valve opened
12/2/2011	2:37:15 AM	Helium MFC set to  0.000000
12/2/2011	2:37:15 AM	H2 MFC set to  0.000000
12/2/2011	2:37:15 AM	BCl3 MFC set to  0.000000
12/2/2011	2:37:15 AM	PHl3 MFC set to  0.000000
12/2/2011	2:37:15 AM	SiCl4 MFC set to  0.000000
12/2/2011	2:37:15 AM	Bypass solenoid MFC set to  0.000000
12/2/2011	2:37:15 AM	Tube furnace set to 0
12/2/2011	3:37:15 AM	Run finished at 3:37 AM
12/2/2011	7:22:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/2/2011	7:22:35 AM	Recipe started at 7:22 AM
12/2/2011	7:22:35 AM	Helium valve closed
12/2/2011	7:22:35 AM	H2 valve closed
12/2/2011	7:22:35 AM	BCl3 valve closed
12/2/2011	7:22:35 AM	PH3 valve closed
12/2/2011	7:22:35 AM	SiCl4 pre valve closed
12/2/2011	7:22:35 AM	SiCl4 post valve closed
12/2/2011	7:22:35 AM	Main Vac valve closed
12/2/2011	7:22:35 AM	Bypass valve closed
12/2/2011	7:22:35 AM	Bubbler valve closed
12/2/2011	7:22:35 AM	Helium MFC set to  0.000000
12/2/2011	7:22:35 AM	H2 MFC set to  0.000000
12/2/2011	7:22:35 AM	BCl3 MFC set to  0.000000
12/2/2011	7:22:35 AM	PHl3 MFC set to  0.000000
12/2/2011	7:22:35 AM	SiCl4 MFC set to  0.000000
12/2/2011	7:22:35 AM	Bypass solenoid MFC set to  0.000000
12/2/2011	7:22:35 AM	Tube furnace set to 0
12/2/2011	7:22:38 AM	H2 valve closed
12/2/2011	7:22:38 AM	BCl3 valve closed
12/2/2011	7:22:38 AM	PH3 valve closed
12/2/2011	7:22:38 AM	SiCl4 pre valve closed
12/2/2011	7:22:38 AM	SiCl4 post valve closed
12/2/2011	7:22:38 AM	Main Vac valve closed
12/2/2011	7:22:38 AM	Bypass valve closed
12/2/2011	7:22:38 AM	Bubbler valve closed
12/2/2011	7:22:38 AM	Helium valve opened
12/2/2011	7:22:38 AM	Helium MFC set to  500.000000
12/2/2011	7:22:38 AM	H2 MFC set to  0.000000
12/2/2011	7:22:38 AM	BCl3 MFC set to  0.000000
12/2/2011	7:22:38 AM	PHl3 MFC set to  0.000000
12/2/2011	7:22:38 AM	SiCl4 MFC set to  0.000000
12/2/2011	7:22:38 AM	Bypass solenoid MFC set to  0.000000
12/2/2011	7:22:38 AM	Tube furnace set to 0
12/2/2011	7:23:43 AM	Helium valve closed
12/2/2011	7:23:43 AM	H2 valve closed
12/2/2011	7:23:43 AM	BCl3 valve closed
12/2/2011	7:23:43 AM	PH3 valve closed
12/2/2011	7:23:43 AM	SiCl4 pre valve closed
12/2/2011	7:23:43 AM	SiCl4 post valve closed
12/2/2011	7:23:43 AM	Main Vac valve closed
12/2/2011	7:23:43 AM	Bypass valve closed
12/2/2011	7:23:43 AM	Bubbler valve closed
12/2/2011	7:23:43 AM	Helium MFC set to  0.000000
12/2/2011	7:23:43 AM	H2 MFC set to  0.000000
12/2/2011	7:23:43 AM	BCl3 MFC set to  0.000000
12/2/2011	7:23:43 AM	PHl3 MFC set to  0.000000
12/2/2011	7:23:43 AM	SiCl4 MFC set to  0.000000
12/2/2011	7:23:43 AM	Bypass solenoid MFC set to  0.000000
12/2/2011	7:23:43 AM	Tube furnace set to 0
12/2/2011	7:23:44 AM	Run finished at 7:23 AM
12/2/2011	7:23:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/2/2011	7:29:21 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/2/2011	7:29:22 AM	Recipe started at 7:29 AM
12/2/2011	7:29:22 AM	Helium valve closed
12/2/2011	7:29:22 AM	H2 valve closed
12/2/2011	7:29:22 AM	BCl3 valve closed
12/2/2011	7:29:22 AM	PH3 valve closed
12/2/2011	7:29:22 AM	SiCl4 pre valve closed
12/2/2011	7:29:22 AM	SiCl4 post valve closed
12/2/2011	7:29:22 AM	Main Vac valve closed
12/2/2011	7:29:22 AM	Bubbler valve closed
12/2/2011	7:29:22 AM	Bypass valve opened
12/2/2011	7:29:22 AM	Helium MFC set to  0.000000
12/2/2011	7:29:22 AM	H2 MFC set to  0.000000
12/2/2011	7:29:22 AM	BCl3 MFC set to  0.000000
12/2/2011	7:29:22 AM	PHl3 MFC set to  0.000000
12/2/2011	7:29:22 AM	SiCl4 MFC set to  0.000000
12/2/2011	7:29:22 AM	Bypass solenoid MFC set to  0.000000
12/2/2011	7:29:22 AM	Tube furnace set to 0
12/2/2011	7:31:00 AM	Helium valve closed
12/2/2011	7:31:00 AM	H2 valve closed
12/2/2011	7:31:00 AM	BCl3 valve closed
12/2/2011	7:31:00 AM	PH3 valve closed
12/2/2011	7:31:00 AM	SiCl4 pre valve closed
12/2/2011	7:31:00 AM	SiCl4 post valve closed
12/2/2011	7:31:00 AM	Main Vac valve closed
12/2/2011	7:31:00 AM	Bubbler valve closed
12/2/2011	7:31:00 AM	Bypass valve opened
12/2/2011	7:31:00 AM	Helium MFC set to  0.000000
12/2/2011	7:31:00 AM	H2 MFC set to  0.000000
12/2/2011	7:31:00 AM	BCl3 MFC set to  0.000000
12/2/2011	7:31:00 AM	PHl3 MFC set to  0.000000
12/2/2011	7:31:00 AM	SiCl4 MFC set to  0.000000
12/2/2011	7:31:00 AM	Bypass solenoid MFC set to  0.000000
12/2/2011	7:31:00 AM	Tube furnace set to 0
12/2/2011	7:32:00 AM	Helium valve closed
12/2/2011	7:32:00 AM	H2 valve closed
12/2/2011	7:32:00 AM	BCl3 valve closed
12/2/2011	7:32:01 AM	PH3 valve closed
12/2/2011	7:32:01 AM	SiCl4 pre valve closed
12/2/2011	7:32:01 AM	SiCl4 post valve closed
12/2/2011	7:32:01 AM	Bypass valve closed
12/2/2011	7:32:01 AM	Bubbler valve closed
12/2/2011	7:32:01 AM	Main Vac valve opened
12/2/2011	7:32:01 AM	Helium MFC set to  0.000000
12/2/2011	7:32:01 AM	H2 MFC set to  0.000000
12/2/2011	7:32:01 AM	BCl3 MFC set to  0.000000
12/2/2011	7:32:01 AM	PHl3 MFC set to  0.000000
12/2/2011	7:32:01 AM	SiCl4 MFC set to  0.000000
12/2/2011	7:32:01 AM	Bypass solenoid MFC set to  0.000000
12/2/2011	7:32:01 AM	Tube furnace set to 0
12/2/2011	7:32:02 AM	Run finished at 7:32 AM
12/2/2011	7:32:02 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/2/2011	9:28:28 AM	Main Vac valve closed
12/2/2011	9:28:57 AM	Main Vac valve opened
12/2/2011	9:30:29 AM	Recipe started at 9:30 AM
12/2/2011	9:30:29 AM	Helium valve closed
12/2/2011	9:30:29 AM	H2 valve closed
12/2/2011	9:30:29 AM	BCl3 valve closed
12/2/2011	9:30:29 AM	PH3 valve closed
12/2/2011	9:30:29 AM	SiCl4 pre valve closed
12/2/2011	9:30:29 AM	SiCl4 post valve closed
12/2/2011	9:30:29 AM	Main Vac valve closed
12/2/2011	9:30:29 AM	Bypass valve closed
12/2/2011	9:30:29 AM	Bubbler valve closed
12/2/2011	9:30:29 AM	Helium MFC set to  0.000000
12/2/2011	9:30:29 AM	H2 MFC set to  0.000000
12/2/2011	9:30:29 AM	BCl3 MFC set to  0.000000
12/2/2011	9:30:29 AM	PHl3 MFC set to  0.000000
12/2/2011	9:30:29 AM	SiCl4 MFC set to  0.000000
12/2/2011	9:30:29 AM	Bypass solenoid MFC set to  0.000000
12/2/2011	9:30:29 AM	Tube furnace set to 0
12/2/2011	9:30:32 AM	Helium valve closed
12/2/2011	9:30:32 AM	BCl3 valve closed
12/2/2011	9:30:32 AM	PH3 valve closed
12/2/2011	9:30:32 AM	SiCl4 pre valve closed
12/2/2011	9:30:32 AM	SiCl4 post valve closed
12/2/2011	9:30:32 AM	Main Vac valve closed
12/2/2011	9:30:32 AM	Bypass valve closed
12/2/2011	9:30:32 AM	Bubbler valve closed
12/2/2011	9:30:32 AM	H2 valve opened
12/2/2011	9:30:32 AM	Helium MFC set to  0.000000
12/2/2011	9:30:32 AM	H2 MFC set to  500.000000
12/2/2011	9:30:32 AM	BCl3 MFC set to  0.000000
12/2/2011	9:30:32 AM	PHl3 MFC set to  0.000000
12/2/2011	9:30:32 AM	SiCl4 MFC set to  0.000000
12/2/2011	9:30:32 AM	Bypass solenoid MFC set to  0.000000
12/2/2011	9:30:32 AM	Tube furnace set to 0
12/2/2011	9:31:40 AM	Helium valve closed
12/2/2011	9:31:40 AM	BCl3 valve closed
12/2/2011	9:31:40 AM	PH3 valve closed
12/2/2011	9:31:40 AM	SiCl4 pre valve closed
12/2/2011	9:31:40 AM	SiCl4 post valve closed
12/2/2011	9:31:40 AM	Main Vac valve closed
12/2/2011	9:31:40 AM	Bypass valve closed
12/2/2011	9:31:40 AM	H2 valve opened
12/2/2011	9:31:40 AM	Bubbler valve opened
12/2/2011	9:31:40 AM	Helium MFC set to  0.000000
12/2/2011	9:31:40 AM	H2 MFC set to  500.000000
12/2/2011	9:31:40 AM	BCl3 MFC set to  0.000000
12/2/2011	9:31:40 AM	PHl3 MFC set to  0.000000
12/2/2011	9:31:40 AM	SiCl4 MFC set to  0.000000
12/2/2011	9:31:40 AM	Bypass solenoid MFC set to  0.000000
12/2/2011	9:31:40 AM	Tube furnace set to 0
12/2/2011	9:31:41 AM	Helium valve closed
12/2/2011	9:31:41 AM	BCl3 valve closed
12/2/2011	9:31:41 AM	PH3 valve closed
12/2/2011	9:31:41 AM	SiCl4 pre valve closed
12/2/2011	9:31:41 AM	SiCl4 post valve closed
12/2/2011	9:31:41 AM	Main Vac valve closed
12/2/2011	9:31:41 AM	Bypass valve closed
12/2/2011	9:31:41 AM	H2 valve opened
12/2/2011	9:31:41 AM	Bubbler valve opened
12/2/2011	9:31:41 AM	Helium MFC set to  0.000000
12/2/2011	9:31:41 AM	H2 MFC set to  500.000000
12/2/2011	9:31:41 AM	BCl3 MFC set to  0.000000
12/2/2011	9:31:41 AM	PHl3 MFC set to  0.000000
12/2/2011	9:31:41 AM	SiCl4 MFC set to  0.000000
12/2/2011	9:31:41 AM	Bypass solenoid MFC set to  0.000000
12/2/2011	9:31:41 AM	Tube furnace set to 1000
12/2/2011	9:56:41 AM	Helium valve closed
12/2/2011	9:56:41 AM	PH3 valve closed
12/2/2011	9:56:41 AM	Main Vac valve closed
12/2/2011	9:56:41 AM	Bypass valve closed
12/2/2011	9:56:41 AM	H2 valve opened
12/2/2011	9:56:41 AM	BCl3 valve opened
12/2/2011	9:56:41 AM	SiCl4 pre valve opened
12/2/2011	9:56:41 AM	SiCl4 post valve opened
12/2/2011	9:56:41 AM	Bubbler valve opened
12/2/2011	9:56:41 AM	Helium MFC set to  0.000000
12/2/2011	9:56:41 AM	H2 MFC set to  450.000000
12/2/2011	9:56:41 AM	BCl3 MFC set to  1.000000
12/2/2011	9:56:41 AM	PHl3 MFC set to  0.000000
12/2/2011	9:56:41 AM	SiCl4 MFC set to  50.000000
12/2/2011	9:56:41 AM	Bypass solenoid MFC set to  0.000000
12/2/2011	9:56:42 AM	Tube furnace set to 1000
12/2/2011	10:36:42 AM	Helium valve closed
12/2/2011	10:36:42 AM	BCl3 valve closed
12/2/2011	10:36:42 AM	PH3 valve closed
12/2/2011	10:36:42 AM	SiCl4 pre valve closed
12/2/2011	10:36:42 AM	SiCl4 post valve closed
12/2/2011	10:36:42 AM	Main Vac valve closed
12/2/2011	10:36:42 AM	Bypass valve closed
12/2/2011	10:36:42 AM	H2 valve opened
12/2/2011	10:36:42 AM	Bubbler valve opened
12/2/2011	10:36:42 AM	Helium MFC set to  0.000000
12/2/2011	10:36:42 AM	H2 MFC set to  500.000000
12/2/2011	10:36:42 AM	BCl3 MFC set to  0.000000
12/2/2011	10:36:42 AM	PHl3 MFC set to  0.000000
12/2/2011	10:36:42 AM	SiCl4 MFC set to  0.000000
12/2/2011	10:36:42 AM	Bypass solenoid MFC set to  0.000000
12/2/2011	10:36:42 AM	Tube furnace set to 750
12/2/2011	10:51:42 AM	H2 valve closed
12/2/2011	10:51:42 AM	BCl3 valve closed
12/2/2011	10:51:42 AM	PH3 valve closed
12/2/2011	10:51:42 AM	SiCl4 pre valve closed
12/2/2011	10:51:42 AM	SiCl4 post valve closed
12/2/2011	10:51:42 AM	Main Vac valve closed
12/2/2011	10:51:42 AM	Bypass valve closed
12/2/2011	10:51:42 AM	Helium valve opened
12/2/2011	10:51:42 AM	Bubbler valve opened
12/2/2011	10:51:42 AM	Helium MFC set to  500.000000
12/2/2011	10:51:42 AM	H2 MFC set to  0.000000
12/2/2011	10:51:42 AM	BCl3 MFC set to  0.000000
12/2/2011	10:51:42 AM	PHl3 MFC set to  0.000000
12/2/2011	10:51:42 AM	SiCl4 MFC set to  0.000000
12/2/2011	10:51:42 AM	Bypass solenoid MFC set to  0.000000
12/2/2011	10:51:42 AM	Tube furnace set to 0
12/2/2011	11:11:42 AM	Helium valve closed
12/2/2011	11:11:42 AM	H2 valve closed
12/2/2011	11:11:42 AM	BCl3 valve closed
12/2/2011	11:11:42 AM	PH3 valve closed
12/2/2011	11:11:42 AM	SiCl4 pre valve closed
12/2/2011	11:11:42 AM	SiCl4 post valve closed
12/2/2011	11:11:42 AM	Main Vac valve closed
12/2/2011	11:11:42 AM	Bypass valve closed
12/2/2011	11:11:42 AM	Bubbler valve closed
12/2/2011	11:11:42 AM	Helium MFC set to  0.000000
12/2/2011	11:11:42 AM	H2 MFC set to  0.000000
12/2/2011	11:11:42 AM	BCl3 MFC set to  0.000000
12/2/2011	11:11:42 AM	PHl3 MFC set to  0.000000
12/2/2011	11:11:42 AM	SiCl4 MFC set to  0.000000
12/2/2011	11:11:42 AM	Bypass solenoid MFC set to  0.000000
12/2/2011	11:11:42 AM	Tube furnace set to 0
12/2/2011	11:31:42 AM	Helium valve closed
12/2/2011	11:31:42 AM	H2 valve closed
12/2/2011	11:31:42 AM	BCl3 valve closed
12/2/2011	11:31:42 AM	PH3 valve closed
12/2/2011	11:31:42 AM	SiCl4 pre valve closed
12/2/2011	11:31:42 AM	SiCl4 post valve closed
12/2/2011	11:31:42 AM	Main Vac valve closed
12/2/2011	11:31:42 AM	Bubbler valve closed
12/2/2011	11:31:42 AM	Bypass valve opened
12/2/2011	11:31:42 AM	Helium MFC set to  0.000000
12/2/2011	11:31:42 AM	H2 MFC set to  0.000000
12/2/2011	11:31:42 AM	BCl3 MFC set to  0.000000
12/2/2011	11:31:42 AM	PHl3 MFC set to  0.000000
12/2/2011	11:31:42 AM	SiCl4 MFC set to  0.000000
12/2/2011	11:31:42 AM	Bypass solenoid MFC set to  0.000000
12/2/2011	11:31:42 AM	Tube furnace set to 0
12/2/2011	11:33:25 AM	Helium valve closed
12/2/2011	11:33:25 AM	H2 valve closed
12/2/2011	11:33:25 AM	BCl3 valve closed
12/2/2011	11:33:25 AM	PH3 valve closed
12/2/2011	11:33:25 AM	SiCl4 pre valve closed
12/2/2011	11:33:25 AM	SiCl4 post valve closed
12/2/2011	11:33:25 AM	Main Vac valve closed
12/2/2011	11:33:25 AM	Bubbler valve closed
12/2/2011	11:33:25 AM	Bypass valve opened
12/2/2011	11:33:25 AM	Helium MFC set to  0.000000
12/2/2011	11:33:25 AM	H2 MFC set to  0.000000
12/2/2011	11:33:25 AM	BCl3 MFC set to  0.000000
12/2/2011	11:33:25 AM	PHl3 MFC set to  0.000000
12/2/2011	11:33:25 AM	SiCl4 MFC set to  0.000000
12/2/2011	11:33:25 AM	Bypass solenoid MFC set to  0.000000
12/2/2011	11:33:25 AM	Tube furnace set to 0
12/2/2011	11:34:25 AM	Helium valve closed
12/2/2011	11:34:25 AM	H2 valve closed
12/2/2011	11:34:25 AM	BCl3 valve closed
12/2/2011	11:34:25 AM	PH3 valve closed
12/2/2011	11:34:25 AM	SiCl4 pre valve closed
12/2/2011	11:34:25 AM	SiCl4 post valve closed
12/2/2011	11:34:25 AM	Bypass valve closed
12/2/2011	11:34:25 AM	Bubbler valve closed
12/2/2011	11:34:25 AM	Main Vac valve opened
12/2/2011	11:34:25 AM	Helium MFC set to  0.000000
12/2/2011	11:34:25 AM	H2 MFC set to  0.000000
12/2/2011	11:34:25 AM	BCl3 MFC set to  0.000000
12/2/2011	11:34:25 AM	PHl3 MFC set to  0.000000
12/2/2011	11:34:25 AM	SiCl4 MFC set to  0.000000
12/2/2011	11:34:25 AM	Bypass solenoid MFC set to  0.000000
12/2/2011	11:34:25 AM	Tube furnace set to 0
12/2/2011	11:46:51 AM	Run aborted at 11:46 AM
12/2/2011	11:46:51 AM	Helium valve closed
12/2/2011	11:46:51 AM	H2 valve closed
12/2/2011	11:46:51 AM	BCl3 valve closed
12/2/2011	11:46:51 AM	PH3 valve closed
12/2/2011	11:46:51 AM	SiCl4 pre valve closed
12/2/2011	11:46:51 AM	SiCl4 post valve closed
12/2/2011	11:46:51 AM	Bypass valve closed
12/2/2011	11:46:51 AM	Main Vac valve closed
12/2/2011	11:46:51 AM	Bubbler valve closed
12/2/2011	11:46:51 AM	Helium MFC set to  0.000000
12/2/2011	11:46:51 AM	H2 MFC set to  0.000000
12/2/2011	11:46:51 AM	BCl3 MFC set to  0.000000
12/2/2011	11:46:51 AM	PHl3 MFC set to  0.000000
12/2/2011	11:46:51 AM	SiCl4 MFC set to  0.000000
12/2/2011	11:46:51 AM	Tube furnace set to 0
12/2/2011	11:47:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/2/2011	11:47:30 AM	Recipe started at 11:47 AM
12/2/2011	11:47:30 AM	Helium valve closed
12/2/2011	11:47:30 AM	H2 valve closed
12/2/2011	11:47:30 AM	BCl3 valve closed
12/2/2011	11:47:30 AM	PH3 valve closed
12/2/2011	11:47:30 AM	SiCl4 pre valve closed
12/2/2011	11:47:30 AM	SiCl4 post valve closed
12/2/2011	11:47:30 AM	Main Vac valve closed
12/2/2011	11:47:30 AM	Bypass valve closed
12/2/2011	11:47:30 AM	Bubbler valve closed
12/2/2011	11:47:30 AM	Helium MFC set to  0.000000
12/2/2011	11:47:30 AM	H2 MFC set to  0.000000
12/2/2011	11:47:30 AM	BCl3 MFC set to  0.000000
12/2/2011	11:47:30 AM	PHl3 MFC set to  0.000000
12/2/2011	11:47:30 AM	SiCl4 MFC set to  0.000000
12/2/2011	11:47:30 AM	Bypass solenoid MFC set to  0.000000
12/2/2011	11:47:30 AM	Tube furnace set to 0
12/2/2011	11:47:33 AM	H2 valve closed
12/2/2011	11:47:33 AM	BCl3 valve closed
12/2/2011	11:47:33 AM	PH3 valve closed
12/2/2011	11:47:33 AM	SiCl4 pre valve closed
12/2/2011	11:47:33 AM	SiCl4 post valve closed
12/2/2011	11:47:33 AM	Main Vac valve closed
12/2/2011	11:47:33 AM	Bypass valve closed
12/2/2011	11:47:33 AM	Bubbler valve closed
12/2/2011	11:47:33 AM	Helium valve opened
12/2/2011	11:47:33 AM	Helium MFC set to  500.000000
12/2/2011	11:47:33 AM	H2 MFC set to  0.000000
12/2/2011	11:47:33 AM	BCl3 MFC set to  0.000000
12/2/2011	11:47:33 AM	PHl3 MFC set to  0.000000
12/2/2011	11:47:33 AM	SiCl4 MFC set to  0.000000
12/2/2011	11:47:33 AM	Bypass solenoid MFC set to  0.000000
12/2/2011	11:47:34 AM	Tube furnace set to 0
12/2/2011	11:48:35 AM	Helium valve closed
12/2/2011	11:48:35 AM	H2 valve closed
12/2/2011	11:48:35 AM	BCl3 valve closed
12/2/2011	11:48:35 AM	PH3 valve closed
12/2/2011	11:48:35 AM	SiCl4 pre valve closed
12/2/2011	11:48:35 AM	SiCl4 post valve closed
12/2/2011	11:48:35 AM	Main Vac valve closed
12/2/2011	11:48:35 AM	Bypass valve closed
12/2/2011	11:48:35 AM	Bubbler valve closed
12/2/2011	11:48:35 AM	Helium MFC set to  0.000000
12/2/2011	11:48:35 AM	H2 MFC set to  0.000000
12/2/2011	11:48:35 AM	BCl3 MFC set to  0.000000
12/2/2011	11:48:35 AM	PHl3 MFC set to  0.000000
12/2/2011	11:48:35 AM	SiCl4 MFC set to  0.000000
12/2/2011	11:48:35 AM	Bypass solenoid MFC set to  0.000000
12/2/2011	11:48:35 AM	Tube furnace set to 0
12/2/2011	11:48:36 AM	Run finished at 11:48 AM
12/2/2011	11:48:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/2/2011	11:59:05 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/2/2011	11:59:06 AM	Recipe started at 11:59 AM
12/2/2011	11:59:06 AM	Helium valve closed
12/2/2011	11:59:06 AM	H2 valve closed
12/2/2011	11:59:06 AM	BCl3 valve closed
12/2/2011	11:59:06 AM	PH3 valve closed
12/2/2011	11:59:06 AM	SiCl4 pre valve closed
12/2/2011	11:59:06 AM	SiCl4 post valve closed
12/2/2011	11:59:06 AM	Main Vac valve closed
12/2/2011	11:59:06 AM	Bubbler valve closed
12/2/2011	11:59:06 AM	Bypass valve opened
12/2/2011	11:59:06 AM	Helium MFC set to  0.000000
12/2/2011	11:59:06 AM	H2 MFC set to  0.000000
12/2/2011	11:59:06 AM	BCl3 MFC set to  0.000000
12/2/2011	11:59:06 AM	PHl3 MFC set to  0.000000
12/2/2011	11:59:06 AM	SiCl4 MFC set to  0.000000
12/2/2011	11:59:06 AM	Bypass solenoid MFC set to  0.000000
12/2/2011	11:59:07 AM	Tube furnace set to 0
12/2/2011	12:01:05 PM	Helium valve closed
12/2/2011	12:01:05 PM	H2 valve closed
12/2/2011	12:01:05 PM	BCl3 valve closed
12/2/2011	12:01:05 PM	PH3 valve closed
12/2/2011	12:01:05 PM	SiCl4 pre valve closed
12/2/2011	12:01:05 PM	SiCl4 post valve closed
12/2/2011	12:01:05 PM	Main Vac valve closed
12/2/2011	12:01:05 PM	Bubbler valve closed
12/2/2011	12:01:05 PM	Bypass valve opened
12/2/2011	12:01:05 PM	Helium MFC set to  0.000000
12/2/2011	12:01:05 PM	H2 MFC set to  0.000000
12/2/2011	12:01:05 PM	BCl3 MFC set to  0.000000
12/2/2011	12:01:05 PM	PHl3 MFC set to  0.000000
12/2/2011	12:01:05 PM	SiCl4 MFC set to  0.000000
12/2/2011	12:01:05 PM	Bypass solenoid MFC set to  0.000000
12/2/2011	12:01:05 PM	Tube furnace set to 0
12/2/2011	12:02:05 PM	Helium valve closed
12/2/2011	12:02:05 PM	H2 valve closed
12/2/2011	12:02:05 PM	BCl3 valve closed
12/2/2011	12:02:06 PM	PH3 valve closed
12/2/2011	12:02:06 PM	SiCl4 pre valve closed
12/2/2011	12:02:06 PM	SiCl4 post valve closed
12/2/2011	12:02:06 PM	Bypass valve closed
12/2/2011	12:02:06 PM	Bubbler valve closed
12/2/2011	12:02:06 PM	Main Vac valve opened
12/2/2011	12:02:06 PM	Helium MFC set to  0.000000
12/2/2011	12:02:06 PM	H2 MFC set to  0.000000
12/2/2011	12:02:06 PM	BCl3 MFC set to  0.000000
12/2/2011	12:02:06 PM	PHl3 MFC set to  0.000000
12/2/2011	12:02:06 PM	SiCl4 MFC set to  0.000000
12/2/2011	12:02:06 PM	Bypass solenoid MFC set to  0.000000
12/2/2011	12:02:06 PM	Tube furnace set to 0
12/2/2011	12:02:07 PM	Run finished at 12:02 PM
12/2/2011	12:02:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/2/2011	1:24:28 PM	Main Vac valve closed
12/2/2011	1:24:40 PM	Main Vac valve opened
12/2/2011	1:25:57 PM	Recipe started at 1:25 PM
12/2/2011	1:25:57 PM	Helium valve closed
12/2/2011	1:25:57 PM	H2 valve closed
12/2/2011	1:25:57 PM	BCl3 valve closed
12/2/2011	1:25:57 PM	PH3 valve closed
12/2/2011	1:25:57 PM	SiCl4 pre valve closed
12/2/2011	1:25:57 PM	SiCl4 post valve closed
12/2/2011	1:25:57 PM	Main Vac valve closed
12/2/2011	1:25:57 PM	Bypass valve closed
12/2/2011	1:25:57 PM	Bubbler valve closed
12/2/2011	1:25:57 PM	Helium MFC set to  0.000000
12/2/2011	1:25:57 PM	H2 MFC set to  0.000000
12/2/2011	1:25:57 PM	BCl3 MFC set to  0.000000
12/2/2011	1:25:57 PM	PHl3 MFC set to  0.000000
12/2/2011	1:25:57 PM	SiCl4 MFC set to  0.000000
12/2/2011	1:25:57 PM	Bypass solenoid MFC set to  0.000000
12/2/2011	1:25:57 PM	Tube furnace set to 0
12/2/2011	1:26:00 PM	Helium valve closed
12/2/2011	1:26:00 PM	BCl3 valve closed
12/2/2011	1:26:00 PM	PH3 valve closed
12/2/2011	1:26:00 PM	SiCl4 pre valve closed
12/2/2011	1:26:00 PM	SiCl4 post valve closed
12/2/2011	1:26:00 PM	Main Vac valve closed
12/2/2011	1:26:00 PM	Bypass valve closed
12/2/2011	1:26:00 PM	Bubbler valve closed
12/2/2011	1:26:00 PM	H2 valve opened
12/2/2011	1:26:00 PM	Helium MFC set to  0.000000
12/2/2011	1:26:00 PM	H2 MFC set to  500.000000
12/2/2011	1:26:00 PM	BCl3 MFC set to  0.000000
12/2/2011	1:26:00 PM	PHl3 MFC set to  0.000000
12/2/2011	1:26:00 PM	SiCl4 MFC set to  0.000000
12/2/2011	1:26:00 PM	Bypass solenoid MFC set to  0.000000
12/2/2011	1:26:00 PM	Tube furnace set to 0
12/2/2011	1:27:07 PM	Helium valve closed
12/2/2011	1:27:07 PM	BCl3 valve closed
12/2/2011	1:27:07 PM	PH3 valve closed
12/2/2011	1:27:07 PM	SiCl4 pre valve closed
12/2/2011	1:27:07 PM	SiCl4 post valve closed
12/2/2011	1:27:07 PM	Main Vac valve closed
12/2/2011	1:27:07 PM	Bypass valve closed
12/2/2011	1:27:07 PM	H2 valve opened
12/2/2011	1:27:07 PM	Bubbler valve opened
12/2/2011	1:27:07 PM	Helium MFC set to  0.000000
12/2/2011	1:27:07 PM	H2 MFC set to  500.000000
12/2/2011	1:27:07 PM	BCl3 MFC set to  0.000000
12/2/2011	1:27:07 PM	PHl3 MFC set to  0.000000
12/2/2011	1:27:07 PM	SiCl4 MFC set to  0.000000
12/2/2011	1:27:07 PM	Bypass solenoid MFC set to  0.000000
12/2/2011	1:27:07 PM	Tube furnace set to 0
12/2/2011	1:27:08 PM	Helium valve closed
12/2/2011	1:27:08 PM	BCl3 valve closed
12/2/2011	1:27:08 PM	PH3 valve closed
12/2/2011	1:27:08 PM	SiCl4 pre valve closed
12/2/2011	1:27:08 PM	SiCl4 post valve closed
12/2/2011	1:27:08 PM	Main Vac valve closed
12/2/2011	1:27:08 PM	Bypass valve closed
12/2/2011	1:27:08 PM	H2 valve opened
12/2/2011	1:27:08 PM	Bubbler valve opened
12/2/2011	1:27:08 PM	Helium MFC set to  0.000000
12/2/2011	1:27:08 PM	H2 MFC set to  500.000000
12/2/2011	1:27:08 PM	BCl3 MFC set to  0.000000
12/2/2011	1:27:08 PM	PHl3 MFC set to  0.000000
12/2/2011	1:27:08 PM	SiCl4 MFC set to  0.000000
12/2/2011	1:27:08 PM	Bypass solenoid MFC set to  0.000000
12/2/2011	1:27:08 PM	Tube furnace set to 1000
12/2/2011	1:52:08 PM	Helium valve closed
12/2/2011	1:52:08 PM	PH3 valve closed
12/2/2011	1:52:08 PM	Main Vac valve closed
12/2/2011	1:52:08 PM	Bypass valve closed
12/2/2011	1:52:08 PM	H2 valve opened
12/2/2011	1:52:08 PM	BCl3 valve opened
12/2/2011	1:52:08 PM	SiCl4 pre valve opened
12/2/2011	1:52:08 PM	SiCl4 post valve opened
12/2/2011	1:52:08 PM	Bubbler valve opened
12/2/2011	1:52:08 PM	Helium MFC set to  0.000000
12/2/2011	1:52:08 PM	H2 MFC set to  450.000000
12/2/2011	1:52:08 PM	BCl3 MFC set to  1.000000
12/2/2011	1:52:08 PM	PHl3 MFC set to  0.000000
12/2/2011	1:52:08 PM	SiCl4 MFC set to  50.000000
12/2/2011	1:52:08 PM	Bypass solenoid MFC set to  0.000000
12/2/2011	1:52:08 PM	Tube furnace set to 1000
12/2/2011	2:22:08 PM	Helium valve closed
12/2/2011	2:22:08 PM	BCl3 valve closed
12/2/2011	2:22:08 PM	PH3 valve closed
12/2/2011	2:22:08 PM	SiCl4 pre valve closed
12/2/2011	2:22:08 PM	SiCl4 post valve closed
12/2/2011	2:22:08 PM	Main Vac valve closed
12/2/2011	2:22:08 PM	Bypass valve closed
12/2/2011	2:22:08 PM	H2 valve opened
12/2/2011	2:22:08 PM	Bubbler valve opened
12/2/2011	2:22:08 PM	Helium MFC set to  0.000000
12/2/2011	2:22:08 PM	H2 MFC set to  500.000000
12/2/2011	2:22:08 PM	BCl3 MFC set to  0.000000
12/2/2011	2:22:08 PM	PHl3 MFC set to  0.000000
12/2/2011	2:22:08 PM	SiCl4 MFC set to  0.000000
12/2/2011	2:22:08 PM	Bypass solenoid MFC set to  0.000000
12/2/2011	2:22:08 PM	Tube furnace set to 750
12/2/2011	2:37:08 PM	H2 valve closed
12/2/2011	2:37:08 PM	BCl3 valve closed
12/2/2011	2:37:08 PM	PH3 valve closed
12/2/2011	2:37:08 PM	SiCl4 pre valve closed
12/2/2011	2:37:08 PM	SiCl4 post valve closed
12/2/2011	2:37:08 PM	Main Vac valve closed
12/2/2011	2:37:08 PM	Bypass valve closed
12/2/2011	2:37:08 PM	Helium valve opened
12/2/2011	2:37:08 PM	Bubbler valve opened
12/2/2011	2:37:08 PM	Helium MFC set to  500.000000
12/2/2011	2:37:08 PM	H2 MFC set to  0.000000
12/2/2011	2:37:08 PM	BCl3 MFC set to  0.000000
12/2/2011	2:37:08 PM	PHl3 MFC set to  0.000000
12/2/2011	2:37:08 PM	SiCl4 MFC set to  0.000000
12/2/2011	2:37:08 PM	Bypass solenoid MFC set to  0.000000
12/2/2011	2:37:08 PM	Tube furnace set to 0
12/2/2011	2:57:08 PM	Helium valve closed
12/2/2011	2:57:08 PM	H2 valve closed
12/2/2011	2:57:08 PM	BCl3 valve closed
12/2/2011	2:57:08 PM	PH3 valve closed
12/2/2011	2:57:08 PM	SiCl4 pre valve closed
12/2/2011	2:57:08 PM	SiCl4 post valve closed
12/2/2011	2:57:08 PM	Main Vac valve closed
12/2/2011	2:57:08 PM	Bypass valve closed
12/2/2011	2:57:08 PM	Bubbler valve closed
12/2/2011	2:57:08 PM	Helium MFC set to  0.000000
12/2/2011	2:57:08 PM	H2 MFC set to  0.000000
12/2/2011	2:57:08 PM	BCl3 MFC set to  0.000000
12/2/2011	2:57:08 PM	PHl3 MFC set to  0.000000
12/2/2011	2:57:08 PM	SiCl4 MFC set to  0.000000
12/2/2011	2:57:08 PM	Bypass solenoid MFC set to  0.000000
12/2/2011	2:57:09 PM	Tube furnace set to 0
12/2/2011	3:14:55 PM	Run aborted at 3:14 PM
12/2/2011	3:14:55 PM	Helium valve closed
12/2/2011	3:14:55 PM	H2 valve closed
12/2/2011	3:14:55 PM	BCl3 valve closed
12/2/2011	3:14:55 PM	PH3 valve closed
12/2/2011	3:14:55 PM	SiCl4 pre valve closed
12/2/2011	3:14:55 PM	SiCl4 post valve closed
12/2/2011	3:14:55 PM	Bypass valve closed
12/2/2011	3:14:55 PM	Main Vac valve closed
12/2/2011	3:14:55 PM	Bubbler valve closed
12/2/2011	3:14:55 PM	Helium MFC set to  0.000000
12/2/2011	3:14:55 PM	H2 MFC set to  0.000000
12/2/2011	3:14:55 PM	BCl3 MFC set to  0.000000
12/2/2011	3:14:55 PM	PHl3 MFC set to  0.000000
12/2/2011	3:14:55 PM	SiCl4 MFC set to  0.000000
12/2/2011	3:14:55 PM	Tube furnace set to 0
12/2/2011	3:14:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/2/2011	3:14:59 PM	Recipe started at 3:14 PM
12/2/2011	3:14:59 PM	Helium valve closed
12/2/2011	3:14:59 PM	H2 valve closed
12/2/2011	3:14:59 PM	BCl3 valve closed
12/2/2011	3:14:59 PM	PH3 valve closed
12/2/2011	3:14:59 PM	SiCl4 pre valve closed
12/2/2011	3:14:59 PM	SiCl4 post valve closed
12/2/2011	3:14:59 PM	Main Vac valve closed
12/2/2011	3:14:59 PM	Bypass valve closed
12/2/2011	3:14:59 PM	Bubbler valve closed
12/2/2011	3:14:59 PM	Helium MFC set to  0.000000
12/2/2011	3:14:59 PM	H2 MFC set to  0.000000
12/2/2011	3:14:59 PM	BCl3 MFC set to  0.000000
12/2/2011	3:14:59 PM	PHl3 MFC set to  0.000000
12/2/2011	3:14:59 PM	SiCl4 MFC set to  0.000000
12/2/2011	3:14:59 PM	Bypass solenoid MFC set to  0.000000
12/2/2011	3:14:59 PM	Tube furnace set to 0
12/2/2011	3:15:02 PM	H2 valve closed
12/2/2011	3:15:02 PM	BCl3 valve closed
12/2/2011	3:15:02 PM	PH3 valve closed
12/2/2011	3:15:02 PM	SiCl4 pre valve closed
12/2/2011	3:15:02 PM	SiCl4 post valve closed
12/2/2011	3:15:02 PM	Main Vac valve closed
12/2/2011	3:15:02 PM	Bypass valve closed
12/2/2011	3:15:02 PM	Bubbler valve closed
12/2/2011	3:15:02 PM	Helium valve opened
12/2/2011	3:15:02 PM	Helium MFC set to  500.000000
12/2/2011	3:15:02 PM	H2 MFC set to  0.000000
12/2/2011	3:15:02 PM	BCl3 MFC set to  0.000000
12/2/2011	3:15:02 PM	PHl3 MFC set to  0.000000
12/2/2011	3:15:02 PM	SiCl4 MFC set to  0.000000
12/2/2011	3:15:02 PM	Bypass solenoid MFC set to  0.000000
12/2/2011	3:15:02 PM	Tube furnace set to 0
12/2/2011	3:15:08 PM	Helium valve closed
12/2/2011	3:15:08 PM	H2 valve closed
12/2/2011	3:15:08 PM	BCl3 valve closed
12/2/2011	3:15:08 PM	PH3 valve closed
12/2/2011	3:15:08 PM	SiCl4 pre valve closed
12/2/2011	3:15:08 PM	SiCl4 post valve closed
12/2/2011	3:15:08 PM	Main Vac valve closed
12/2/2011	3:15:08 PM	Bypass valve closed
12/2/2011	3:15:08 PM	Bubbler valve closed
12/2/2011	3:15:08 PM	Helium MFC set to  0.000000
12/2/2011	3:15:08 PM	H2 MFC set to  0.000000
12/2/2011	3:15:08 PM	BCl3 MFC set to  0.000000
12/2/2011	3:15:08 PM	PHl3 MFC set to  0.000000
12/2/2011	3:15:08 PM	SiCl4 MFC set to  0.000000
12/2/2011	3:15:08 PM	Bypass solenoid MFC set to  0.000000
12/2/2011	3:15:08 PM	Tube furnace set to 0
12/2/2011	3:15:09 PM	Run finished at 3:15 PM
12/2/2011	3:15:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/2/2011	3:25:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/2/2011	3:25:53 PM	Recipe started at 3:25 PM
12/2/2011	3:25:53 PM	Helium valve closed
12/2/2011	3:25:53 PM	H2 valve closed
12/2/2011	3:25:53 PM	BCl3 valve closed
12/2/2011	3:25:53 PM	PH3 valve closed
12/2/2011	3:25:53 PM	SiCl4 pre valve closed
12/2/2011	3:25:53 PM	SiCl4 post valve closed
12/2/2011	3:25:53 PM	Main Vac valve closed
12/2/2011	3:25:53 PM	Bubbler valve closed
12/2/2011	3:25:53 PM	Bypass valve opened
12/2/2011	3:25:53 PM	Helium MFC set to  0.000000
12/2/2011	3:25:53 PM	H2 MFC set to  0.000000
12/2/2011	3:25:53 PM	BCl3 MFC set to  0.000000
12/2/2011	3:25:53 PM	PHl3 MFC set to  0.000000
12/2/2011	3:25:53 PM	SiCl4 MFC set to  0.000000
12/2/2011	3:25:53 PM	Bypass solenoid MFC set to  0.000000
12/2/2011	3:25:53 PM	Tube furnace set to 0
12/2/2011	3:28:04 PM	Helium valve closed
12/2/2011	3:28:04 PM	H2 valve closed
12/2/2011	3:28:04 PM	BCl3 valve closed
12/2/2011	3:28:04 PM	PH3 valve closed
12/2/2011	3:28:04 PM	SiCl4 pre valve closed
12/2/2011	3:28:04 PM	SiCl4 post valve closed
12/2/2011	3:28:04 PM	Main Vac valve closed
12/2/2011	3:28:04 PM	Bubbler valve closed
12/2/2011	3:28:04 PM	Bypass valve opened
12/2/2011	3:28:04 PM	Helium MFC set to  0.000000
12/2/2011	3:28:04 PM	H2 MFC set to  0.000000
12/2/2011	3:28:04 PM	BCl3 MFC set to  0.000000
12/2/2011	3:28:04 PM	PHl3 MFC set to  0.000000
12/2/2011	3:28:04 PM	SiCl4 MFC set to  0.000000
12/2/2011	3:28:04 PM	Bypass solenoid MFC set to  0.000000
12/2/2011	3:28:04 PM	Tube furnace set to 0
12/2/2011	3:29:04 PM	Helium valve closed
12/2/2011	3:29:04 PM	H2 valve closed
12/2/2011	3:29:04 PM	BCl3 valve closed
12/2/2011	3:29:04 PM	PH3 valve closed
12/2/2011	3:29:04 PM	SiCl4 pre valve closed
12/2/2011	3:29:04 PM	SiCl4 post valve closed
12/2/2011	3:29:04 PM	Bypass valve closed
12/2/2011	3:29:04 PM	Bubbler valve closed
12/2/2011	3:29:04 PM	Main Vac valve opened
12/2/2011	3:29:04 PM	Helium MFC set to  0.000000
12/2/2011	3:29:04 PM	H2 MFC set to  0.000000
12/2/2011	3:29:04 PM	BCl3 MFC set to  0.000000
12/2/2011	3:29:04 PM	PHl3 MFC set to  0.000000
12/2/2011	3:29:04 PM	SiCl4 MFC set to  0.000000
12/2/2011	3:29:04 PM	Bypass solenoid MFC set to  0.000000
12/2/2011	3:29:04 PM	Tube furnace set to 0
12/2/2011	3:29:05 PM	Run finished at 3:29 PM
12/2/2011	3:29:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/2/2011	4:04:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/2/2011	4:04:47 PM	Recipe started at 4:04 PM
12/2/2011	4:04:47 PM	Helium valve closed
12/2/2011	4:04:47 PM	H2 valve closed
12/2/2011	4:04:47 PM	BCl3 valve closed
12/2/2011	4:04:48 PM	PH3 valve closed
12/2/2011	4:04:48 PM	SiCl4 pre valve closed
12/2/2011	4:04:48 PM	SiCl4 post valve closed
12/2/2011	4:04:48 PM	Main Vac valve closed
12/2/2011	4:04:48 PM	Bypass valve closed
12/2/2011	4:04:48 PM	Bubbler valve closed
12/2/2011	4:04:48 PM	Helium MFC set to  0.000000
12/2/2011	4:04:48 PM	H2 MFC set to  0.000000
12/2/2011	4:04:48 PM	BCl3 MFC set to  0.000000
12/2/2011	4:04:48 PM	PHl3 MFC set to  0.000000
12/2/2011	4:04:48 PM	SiCl4 MFC set to  0.000000
12/2/2011	4:04:48 PM	Bypass solenoid MFC set to  0.000000
12/2/2011	4:04:48 PM	Tube furnace set to 0
12/2/2011	4:04:51 PM	H2 valve closed
12/2/2011	4:04:51 PM	BCl3 valve closed
12/2/2011	4:04:51 PM	PH3 valve closed
12/2/2011	4:04:51 PM	SiCl4 pre valve closed
12/2/2011	4:04:51 PM	SiCl4 post valve closed
12/2/2011	4:04:51 PM	Main Vac valve closed
12/2/2011	4:04:51 PM	Bypass valve closed
12/2/2011	4:04:51 PM	Bubbler valve closed
12/2/2011	4:04:51 PM	Helium valve opened
12/2/2011	4:04:51 PM	Helium MFC set to  500.000000
12/2/2011	4:04:51 PM	H2 MFC set to  0.000000
12/2/2011	4:04:51 PM	BCl3 MFC set to  0.000000
12/2/2011	4:04:51 PM	PHl3 MFC set to  0.000000
12/2/2011	4:04:51 PM	SiCl4 MFC set to  0.000000
12/2/2011	4:04:51 PM	Bypass solenoid MFC set to  0.000000
12/2/2011	4:04:51 PM	Tube furnace set to 0
12/2/2011	4:05:53 PM	Helium valve closed
12/2/2011	4:05:53 PM	H2 valve closed
12/2/2011	4:05:53 PM	BCl3 valve closed
12/2/2011	4:05:53 PM	PH3 valve closed
12/2/2011	4:05:53 PM	SiCl4 pre valve closed
12/2/2011	4:05:53 PM	SiCl4 post valve closed
12/2/2011	4:05:53 PM	Main Vac valve closed
12/2/2011	4:05:53 PM	Bypass valve closed
12/2/2011	4:05:53 PM	Bubbler valve closed
12/2/2011	4:05:53 PM	Helium MFC set to  0.000000
12/2/2011	4:05:53 PM	H2 MFC set to  0.000000
12/2/2011	4:05:53 PM	BCl3 MFC set to  0.000000
12/2/2011	4:05:53 PM	PHl3 MFC set to  0.000000
12/2/2011	4:05:53 PM	SiCl4 MFC set to  0.000000
12/2/2011	4:05:53 PM	Bypass solenoid MFC set to  0.000000
12/2/2011	4:05:54 PM	Tube furnace set to 0
12/2/2011	4:05:55 PM	Run finished at 4:05 PM
12/2/2011	4:05:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/2/2011	4:11:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/2/2011	4:11:10 PM	Recipe started at 4:11 PM
12/2/2011	4:11:10 PM	Helium valve closed
12/2/2011	4:11:10 PM	H2 valve closed
12/2/2011	4:11:10 PM	BCl3 valve closed
12/2/2011	4:11:10 PM	PH3 valve closed
12/2/2011	4:11:10 PM	SiCl4 pre valve closed
12/2/2011	4:11:10 PM	SiCl4 post valve closed
12/2/2011	4:11:10 PM	Main Vac valve closed
12/2/2011	4:11:10 PM	Bubbler valve closed
12/2/2011	4:11:10 PM	Bypass valve opened
12/2/2011	4:11:10 PM	Helium MFC set to  0.000000
12/2/2011	4:11:10 PM	H2 MFC set to  0.000000
12/2/2011	4:11:10 PM	BCl3 MFC set to  0.000000
12/2/2011	4:11:10 PM	PHl3 MFC set to  0.000000
12/2/2011	4:11:10 PM	SiCl4 MFC set to  0.000000
12/2/2011	4:11:10 PM	Bypass solenoid MFC set to  0.000000
12/2/2011	4:11:10 PM	Tube furnace set to 0
12/2/2011	4:13:09 PM	Helium valve closed
12/2/2011	4:13:09 PM	H2 valve closed
12/2/2011	4:13:09 PM	BCl3 valve closed
12/2/2011	4:13:09 PM	PH3 valve closed
12/2/2011	4:13:09 PM	SiCl4 pre valve closed
12/2/2011	4:13:09 PM	SiCl4 post valve closed
12/2/2011	4:13:09 PM	Main Vac valve closed
12/2/2011	4:13:09 PM	Bubbler valve closed
12/2/2011	4:13:09 PM	Bypass valve opened
12/2/2011	4:13:09 PM	Helium MFC set to  0.000000
12/2/2011	4:13:09 PM	H2 MFC set to  0.000000
12/2/2011	4:13:09 PM	BCl3 MFC set to  0.000000
12/2/2011	4:13:09 PM	PHl3 MFC set to  0.000000
12/2/2011	4:13:09 PM	SiCl4 MFC set to  0.000000
12/2/2011	4:13:09 PM	Bypass solenoid MFC set to  0.000000
12/2/2011	4:13:09 PM	Tube furnace set to 0
12/2/2011	4:14:09 PM	Helium valve closed
12/2/2011	4:14:09 PM	H2 valve closed
12/2/2011	4:14:09 PM	BCl3 valve closed
12/2/2011	4:14:09 PM	PH3 valve closed
12/2/2011	4:14:09 PM	SiCl4 pre valve closed
12/2/2011	4:14:09 PM	SiCl4 post valve closed
12/2/2011	4:14:09 PM	Bypass valve closed
12/2/2011	4:14:09 PM	Bubbler valve closed
12/2/2011	4:14:09 PM	Main Vac valve opened
12/2/2011	4:14:09 PM	Helium MFC set to  0.000000
12/2/2011	4:14:09 PM	H2 MFC set to  0.000000
12/2/2011	4:14:09 PM	BCl3 MFC set to  0.000000
12/2/2011	4:14:09 PM	PHl3 MFC set to  0.000000
12/2/2011	4:14:09 PM	SiCl4 MFC set to  0.000000
12/2/2011	4:14:09 PM	Bypass solenoid MFC set to  0.000000
12/2/2011	4:14:09 PM	Tube furnace set to 0
12/2/2011	4:14:10 PM	Run finished at 4:14 PM
12/2/2011	4:14:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/2/2011	5:49:13 PM	Main Vac valve closed
12/2/2011	5:49:26 PM	Main Vac valve opened
12/2/2011	5:51:34 PM	Recipe started at 5:51 PM
12/2/2011	5:51:34 PM	Helium valve closed
12/2/2011	5:51:34 PM	H2 valve closed
12/2/2011	5:51:34 PM	BCl3 valve closed
12/2/2011	5:51:34 PM	PH3 valve closed
12/2/2011	5:51:34 PM	SiCl4 pre valve closed
12/2/2011	5:51:34 PM	SiCl4 post valve closed
12/2/2011	5:51:34 PM	Bypass valve closed
12/2/2011	5:51:34 PM	Bubbler valve closed
12/2/2011	5:51:34 PM	Main Vac valve opened
12/2/2011	5:51:34 PM	Helium MFC set to  0.000000
12/2/2011	5:51:34 PM	H2 MFC set to  0.000000
12/2/2011	5:51:34 PM	BCl3 MFC set to  0.000000
12/2/2011	5:51:34 PM	PHl3 MFC set to  0.000000
12/2/2011	5:51:34 PM	SiCl4 MFC set to  0.000000
12/2/2011	5:51:34 PM	Bypass solenoid MFC set to  0.000000
12/2/2011	5:51:34 PM	Tube furnace set to 0
12/2/2011	6:21:34 PM	Helium valve closed
12/2/2011	6:21:34 PM	H2 valve closed
12/2/2011	6:21:34 PM	BCl3 valve closed
12/2/2011	6:21:34 PM	PH3 valve closed
12/2/2011	6:21:34 PM	SiCl4 pre valve closed
12/2/2011	6:21:34 PM	SiCl4 post valve closed
12/2/2011	6:21:34 PM	Main Vac valve closed
12/2/2011	6:21:34 PM	Bypass valve closed
12/2/2011	6:21:34 PM	Bubbler valve closed
12/2/2011	6:21:34 PM	Helium MFC set to  0.000000
12/2/2011	6:21:34 PM	H2 MFC set to  0.000000
12/2/2011	6:21:34 PM	BCl3 MFC set to  0.000000
12/2/2011	6:21:34 PM	PHl3 MFC set to  0.000000
12/2/2011	6:21:34 PM	SiCl4 MFC set to  0.000000
12/2/2011	6:21:34 PM	Bypass solenoid MFC set to  0.000000
12/2/2011	6:21:34 PM	Tube furnace set to 0
12/2/2011	6:21:37 PM	Helium valve closed
12/2/2011	6:21:37 PM	BCl3 valve closed
12/2/2011	6:21:37 PM	PH3 valve closed
12/2/2011	6:21:37 PM	SiCl4 pre valve closed
12/2/2011	6:21:37 PM	SiCl4 post valve closed
12/2/2011	6:21:37 PM	Main Vac valve closed
12/2/2011	6:21:37 PM	Bypass valve closed
12/2/2011	6:21:37 PM	Bubbler valve closed
12/2/2011	6:21:37 PM	H2 valve opened
12/2/2011	6:21:37 PM	Helium MFC set to  0.000000
12/2/2011	6:21:37 PM	H2 MFC set to  500.000000
12/2/2011	6:21:37 PM	BCl3 MFC set to  0.000000
12/2/2011	6:21:37 PM	PHl3 MFC set to  0.000000
12/2/2011	6:21:37 PM	SiCl4 MFC set to  0.000000
12/2/2011	6:21:37 PM	Bypass solenoid MFC set to  0.000000
12/2/2011	6:21:37 PM	Tube furnace set to 0
12/2/2011	6:22:45 PM	Helium valve closed
12/2/2011	6:22:45 PM	BCl3 valve closed
12/2/2011	6:22:45 PM	PH3 valve closed
12/2/2011	6:22:45 PM	SiCl4 pre valve closed
12/2/2011	6:22:45 PM	SiCl4 post valve closed
12/2/2011	6:22:45 PM	Main Vac valve closed
12/2/2011	6:22:45 PM	Bypass valve closed
12/2/2011	6:22:45 PM	H2 valve opened
12/2/2011	6:22:45 PM	Bubbler valve opened
12/2/2011	6:22:45 PM	Helium MFC set to  0.000000
12/2/2011	6:22:45 PM	H2 MFC set to  500.000000
12/2/2011	6:22:45 PM	BCl3 MFC set to  0.000000
12/2/2011	6:22:45 PM	PHl3 MFC set to  0.000000
12/2/2011	6:22:45 PM	SiCl4 MFC set to  0.000000
12/2/2011	6:22:45 PM	Bypass solenoid MFC set to  0.000000
12/2/2011	6:22:45 PM	Tube furnace set to 0
12/2/2011	6:22:46 PM	Helium valve closed
12/2/2011	6:22:46 PM	BCl3 valve closed
12/2/2011	6:22:46 PM	PH3 valve closed
12/2/2011	6:22:46 PM	SiCl4 pre valve closed
12/2/2011	6:22:46 PM	SiCl4 post valve closed
12/2/2011	6:22:46 PM	Main Vac valve closed
12/2/2011	6:22:46 PM	Bypass valve closed
12/2/2011	6:22:46 PM	H2 valve opened
12/2/2011	6:22:46 PM	Bubbler valve opened
12/2/2011	6:22:46 PM	Helium MFC set to  0.000000
12/2/2011	6:22:46 PM	H2 MFC set to  500.000000
12/2/2011	6:22:46 PM	BCl3 MFC set to  0.000000
12/2/2011	6:22:46 PM	PHl3 MFC set to  0.000000
12/2/2011	6:22:46 PM	SiCl4 MFC set to  0.000000
12/2/2011	6:22:46 PM	Bypass solenoid MFC set to  0.000000
12/2/2011	6:22:46 PM	Tube furnace set to 1000
12/2/2011	6:47:46 PM	Helium valve closed
12/2/2011	6:47:46 PM	PH3 valve closed
12/2/2011	6:47:46 PM	Main Vac valve closed
12/2/2011	6:47:46 PM	Bypass valve closed
12/2/2011	6:47:46 PM	H2 valve opened
12/2/2011	6:47:46 PM	BCl3 valve opened
12/2/2011	6:47:46 PM	SiCl4 pre valve opened
12/2/2011	6:47:46 PM	SiCl4 post valve opened
12/2/2011	6:47:46 PM	Bubbler valve opened
12/2/2011	6:47:46 PM	Helium MFC set to  0.000000
12/2/2011	6:47:46 PM	H2 MFC set to  450.000000
12/2/2011	6:47:46 PM	BCl3 MFC set to  1.000000
12/2/2011	6:47:46 PM	PHl3 MFC set to  0.000000
12/2/2011	6:47:46 PM	SiCl4 MFC set to  50.000000
12/2/2011	6:47:46 PM	Bypass solenoid MFC set to  0.000000
12/2/2011	6:47:46 PM	Tube furnace set to 1000
12/2/2011	7:37:46 PM	Helium valve closed
12/2/2011	7:37:46 PM	BCl3 valve closed
12/2/2011	7:37:46 PM	PH3 valve closed
12/2/2011	7:37:46 PM	SiCl4 pre valve closed
12/2/2011	7:37:46 PM	SiCl4 post valve closed
12/2/2011	7:37:46 PM	Main Vac valve closed
12/2/2011	7:37:46 PM	Bypass valve closed
12/2/2011	7:37:46 PM	H2 valve opened
12/2/2011	7:37:46 PM	Bubbler valve opened
12/2/2011	7:37:46 PM	Helium MFC set to  0.000000
12/2/2011	7:37:46 PM	H2 MFC set to  500.000000
12/2/2011	7:37:46 PM	BCl3 MFC set to  0.000000
12/2/2011	7:37:46 PM	PHl3 MFC set to  0.000000
12/2/2011	7:37:46 PM	SiCl4 MFC set to  0.000000
12/2/2011	7:37:46 PM	Bypass solenoid MFC set to  0.000000
12/2/2011	7:37:46 PM	Tube furnace set to 750
12/2/2011	7:52:46 PM	H2 valve closed
12/2/2011	7:52:46 PM	BCl3 valve closed
12/2/2011	7:52:46 PM	PH3 valve closed
12/2/2011	7:52:46 PM	SiCl4 pre valve closed
12/2/2011	7:52:46 PM	SiCl4 post valve closed
12/2/2011	7:52:46 PM	Main Vac valve closed
12/2/2011	7:52:46 PM	Bypass valve closed
12/2/2011	7:52:46 PM	Helium valve opened
12/2/2011	7:52:46 PM	Bubbler valve opened
12/2/2011	7:52:46 PM	Helium MFC set to  500.000000
12/2/2011	7:52:46 PM	H2 MFC set to  0.000000
12/2/2011	7:52:46 PM	BCl3 MFC set to  0.000000
12/2/2011	7:52:46 PM	PHl3 MFC set to  0.000000
12/2/2011	7:52:46 PM	SiCl4 MFC set to  0.000000
12/2/2011	7:52:46 PM	Bypass solenoid MFC set to  0.000000
12/2/2011	7:52:47 PM	Tube furnace set to 0
12/2/2011	8:12:47 PM	Helium valve closed
12/2/2011	8:12:47 PM	H2 valve closed
12/2/2011	8:12:47 PM	BCl3 valve closed
12/2/2011	8:12:47 PM	PH3 valve closed
12/2/2011	8:12:47 PM	SiCl4 pre valve closed
12/2/2011	8:12:47 PM	SiCl4 post valve closed
12/2/2011	8:12:47 PM	Main Vac valve closed
12/2/2011	8:12:47 PM	Bypass valve closed
12/2/2011	8:12:47 PM	Bubbler valve closed
12/2/2011	8:12:47 PM	Helium MFC set to  0.000000
12/2/2011	8:12:47 PM	H2 MFC set to  0.000000
12/2/2011	8:12:47 PM	BCl3 MFC set to  0.000000
12/2/2011	8:12:47 PM	PHl3 MFC set to  0.000000
12/2/2011	8:12:47 PM	SiCl4 MFC set to  0.000000
12/2/2011	8:12:47 PM	Bypass solenoid MFC set to  0.000000
12/2/2011	8:12:47 PM	Tube furnace set to 0
12/2/2011	8:32:47 PM	Helium valve closed
12/2/2011	8:32:47 PM	H2 valve closed
12/2/2011	8:32:47 PM	BCl3 valve closed
12/2/2011	8:32:47 PM	PH3 valve closed
12/2/2011	8:32:47 PM	SiCl4 pre valve closed
12/2/2011	8:32:47 PM	SiCl4 post valve closed
12/2/2011	8:32:47 PM	Main Vac valve closed
12/2/2011	8:32:47 PM	Bubbler valve closed
12/2/2011	8:32:47 PM	Bypass valve opened
12/2/2011	8:32:47 PM	Helium MFC set to  0.000000
12/2/2011	8:32:47 PM	H2 MFC set to  0.000000
12/2/2011	8:32:47 PM	BCl3 MFC set to  0.000000
12/2/2011	8:32:47 PM	PHl3 MFC set to  0.000000
12/2/2011	8:32:47 PM	SiCl4 MFC set to  0.000000
12/2/2011	8:32:47 PM	Bypass solenoid MFC set to  0.000000
12/2/2011	8:32:47 PM	Tube furnace set to 0
12/2/2011	8:34:30 PM	Run aborted at 8:34 PM
12/2/2011	8:34:30 PM	Helium valve closed
12/2/2011	8:34:30 PM	H2 valve closed
12/2/2011	8:34:30 PM	BCl3 valve closed
12/2/2011	8:34:30 PM	PH3 valve closed
12/2/2011	8:34:30 PM	SiCl4 pre valve closed
12/2/2011	8:34:30 PM	SiCl4 post valve closed
12/2/2011	8:34:30 PM	Bypass valve closed
12/2/2011	8:34:30 PM	Main Vac valve closed
12/2/2011	8:34:30 PM	Bubbler valve closed
12/2/2011	8:34:30 PM	Helium MFC set to  0.000000
12/2/2011	8:34:30 PM	H2 MFC set to  0.000000
12/2/2011	8:34:30 PM	BCl3 MFC set to  0.000000
12/2/2011	8:34:30 PM	PHl3 MFC set to  0.000000
12/2/2011	8:34:30 PM	SiCl4 MFC set to  0.000000
12/2/2011	8:34:30 PM	Tube furnace set to 0
12/2/2011	8:34:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/2/2011	8:34:33 PM	Recipe started at 8:34 PM
12/2/2011	8:34:33 PM	Helium valve closed
12/2/2011	8:34:33 PM	H2 valve closed
12/2/2011	8:34:33 PM	BCl3 valve closed
12/2/2011	8:34:33 PM	PH3 valve closed
12/2/2011	8:34:33 PM	SiCl4 pre valve closed
12/2/2011	8:34:33 PM	SiCl4 post valve closed
12/2/2011	8:34:33 PM	Main Vac valve closed
12/2/2011	8:34:33 PM	Bypass valve closed
12/2/2011	8:34:33 PM	Bubbler valve closed
12/2/2011	8:34:33 PM	Helium MFC set to  0.000000
12/2/2011	8:34:33 PM	H2 MFC set to  0.000000
12/2/2011	8:34:33 PM	BCl3 MFC set to  0.000000
12/2/2011	8:34:33 PM	PHl3 MFC set to  0.000000
12/2/2011	8:34:33 PM	SiCl4 MFC set to  0.000000
12/2/2011	8:34:33 PM	Bypass solenoid MFC set to  0.000000
12/2/2011	8:34:34 PM	Tube furnace set to 0
12/2/2011	8:34:37 PM	H2 valve closed
12/2/2011	8:34:37 PM	BCl3 valve closed
12/2/2011	8:34:37 PM	PH3 valve closed
12/2/2011	8:34:37 PM	SiCl4 pre valve closed
12/2/2011	8:34:37 PM	SiCl4 post valve closed
12/2/2011	8:34:37 PM	Main Vac valve closed
12/2/2011	8:34:37 PM	Bypass valve closed
12/2/2011	8:34:37 PM	Bubbler valve closed
12/2/2011	8:34:37 PM	Helium valve opened
12/2/2011	8:34:37 PM	Helium MFC set to  500.000000
12/2/2011	8:34:37 PM	H2 MFC set to  0.000000
12/2/2011	8:34:37 PM	BCl3 MFC set to  0.000000
12/2/2011	8:34:37 PM	PHl3 MFC set to  0.000000
12/2/2011	8:34:37 PM	SiCl4 MFC set to  0.000000
12/2/2011	8:34:37 PM	Bypass solenoid MFC set to  0.000000
12/2/2011	8:34:37 PM	Tube furnace set to 0
12/2/2011	8:35:39 PM	Helium valve closed
12/2/2011	8:35:39 PM	H2 valve closed
12/2/2011	8:35:39 PM	BCl3 valve closed
12/2/2011	8:35:39 PM	PH3 valve closed
12/2/2011	8:35:39 PM	SiCl4 pre valve closed
12/2/2011	8:35:39 PM	SiCl4 post valve closed
12/2/2011	8:35:39 PM	Main Vac valve closed
12/2/2011	8:35:39 PM	Bypass valve closed
12/2/2011	8:35:39 PM	Bubbler valve closed
12/2/2011	8:35:39 PM	Helium MFC set to  0.000000
12/2/2011	8:35:39 PM	H2 MFC set to  0.000000
12/2/2011	8:35:39 PM	BCl3 MFC set to  0.000000
12/2/2011	8:35:39 PM	PHl3 MFC set to  0.000000
12/2/2011	8:35:39 PM	SiCl4 MFC set to  0.000000
12/2/2011	8:35:39 PM	Bypass solenoid MFC set to  0.000000
12/2/2011	8:35:39 PM	Tube furnace set to 0
12/2/2011	8:35:40 PM	Run finished at 8:35 PM
12/2/2011	8:35:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/2/2011	8:47:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/2/2011	8:47:12 PM	Recipe started at 8:47 PM
12/2/2011	8:47:12 PM	Helium valve closed
12/2/2011	8:47:12 PM	H2 valve closed
12/2/2011	8:47:12 PM	BCl3 valve closed
12/2/2011	8:47:12 PM	PH3 valve closed
12/2/2011	8:47:12 PM	SiCl4 pre valve closed
12/2/2011	8:47:12 PM	SiCl4 post valve closed
12/2/2011	8:47:12 PM	Main Vac valve closed
12/2/2011	8:47:12 PM	Bubbler valve closed
12/2/2011	8:47:12 PM	Bypass valve opened
12/2/2011	8:47:12 PM	Helium MFC set to  0.000000
12/2/2011	8:47:12 PM	H2 MFC set to  0.000000
12/2/2011	8:47:12 PM	BCl3 MFC set to  0.000000
12/2/2011	8:47:12 PM	PHl3 MFC set to  0.000000
12/2/2011	8:47:12 PM	SiCl4 MFC set to  0.000000
12/2/2011	8:47:12 PM	Bypass solenoid MFC set to  0.000000
12/2/2011	8:47:12 PM	Tube furnace set to 0
12/2/2011	8:49:27 PM	Helium valve closed
12/2/2011	8:49:27 PM	H2 valve closed
12/2/2011	8:49:27 PM	BCl3 valve closed
12/2/2011	8:49:27 PM	PH3 valve closed
12/2/2011	8:49:27 PM	SiCl4 pre valve closed
12/2/2011	8:49:27 PM	SiCl4 post valve closed
12/2/2011	8:49:27 PM	Main Vac valve closed
12/2/2011	8:49:27 PM	Bubbler valve closed
12/2/2011	8:49:27 PM	Bypass valve opened
12/2/2011	8:49:27 PM	Helium MFC set to  0.000000
12/2/2011	8:49:27 PM	H2 MFC set to  0.000000
12/2/2011	8:49:27 PM	BCl3 MFC set to  0.000000
12/2/2011	8:49:27 PM	PHl3 MFC set to  0.000000
12/2/2011	8:49:27 PM	SiCl4 MFC set to  0.000000
12/2/2011	8:49:27 PM	Bypass solenoid MFC set to  0.000000
12/2/2011	8:49:27 PM	Tube furnace set to 0
12/2/2011	8:50:27 PM	Helium valve closed
12/2/2011	8:50:27 PM	H2 valve closed
12/2/2011	8:50:27 PM	BCl3 valve closed
12/2/2011	8:50:27 PM	PH3 valve closed
12/2/2011	8:50:27 PM	SiCl4 pre valve closed
12/2/2011	8:50:27 PM	SiCl4 post valve closed
12/2/2011	8:50:27 PM	Bypass valve closed
12/2/2011	8:50:27 PM	Bubbler valve closed
12/2/2011	8:50:27 PM	Main Vac valve opened
12/2/2011	8:50:27 PM	Helium MFC set to  0.000000
12/2/2011	8:50:27 PM	H2 MFC set to  0.000000
12/2/2011	8:50:27 PM	BCl3 MFC set to  0.000000
12/2/2011	8:50:27 PM	PHl3 MFC set to  0.000000
12/2/2011	8:50:27 PM	SiCl4 MFC set to  0.000000
12/2/2011	8:50:27 PM	Bypass solenoid MFC set to  0.000000
12/2/2011	8:50:27 PM	Tube furnace set to 0
12/2/2011	8:50:28 PM	Run finished at 8:50 PM
12/2/2011	8:50:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/2/2011	8:52:27 PM	Recipe started at 8:52 PM
12/2/2011	8:52:27 PM	Helium valve closed
12/2/2011	8:52:27 PM	H2 valve closed
12/2/2011	8:52:27 PM	BCl3 valve closed
12/2/2011	8:52:27 PM	PH3 valve closed
12/2/2011	8:52:27 PM	SiCl4 pre valve closed
12/2/2011	8:52:27 PM	SiCl4 post valve closed
12/2/2011	8:52:27 PM	Bypass valve closed
12/2/2011	8:52:27 PM	Bubbler valve closed
12/2/2011	8:52:27 PM	Main Vac valve opened
12/2/2011	8:52:27 PM	Helium MFC set to  0.000000
12/2/2011	8:52:27 PM	H2 MFC set to  0.000000
12/2/2011	8:52:27 PM	BCl3 MFC set to  0.000000
12/2/2011	8:52:27 PM	PHl3 MFC set to  0.000000
12/2/2011	8:52:27 PM	SiCl4 MFC set to  0.000000
12/2/2011	8:52:27 PM	Bypass solenoid MFC set to  0.000000
12/2/2011	8:52:27 PM	Tube furnace set to 0
12/2/2011	11:52:27 PM	Helium valve closed
12/2/2011	11:52:27 PM	H2 valve closed
12/2/2011	11:52:27 PM	BCl3 valve closed
12/2/2011	11:52:27 PM	PH3 valve closed
12/2/2011	11:52:27 PM	SiCl4 pre valve closed
12/2/2011	11:52:27 PM	SiCl4 post valve closed
12/2/2011	11:52:27 PM	Main Vac valve closed
12/2/2011	11:52:27 PM	Bypass valve closed
12/2/2011	11:52:27 PM	Bubbler valve closed
12/2/2011	11:52:27 PM	Helium MFC set to  0.000000
12/2/2011	11:52:27 PM	H2 MFC set to  0.000000
12/2/2011	11:52:27 PM	BCl3 MFC set to  0.000000
12/2/2011	11:52:27 PM	PHl3 MFC set to  0.000000
12/2/2011	11:52:27 PM	SiCl4 MFC set to  0.000000
12/2/2011	11:52:27 PM	Bypass solenoid MFC set to  0.000000
12/2/2011	11:52:27 PM	Tube furnace set to 0
12/2/2011	11:52:30 PM	Helium valve closed
12/2/2011	11:52:30 PM	BCl3 valve closed
12/2/2011	11:52:30 PM	PH3 valve closed
12/2/2011	11:52:31 PM	SiCl4 pre valve closed
12/2/2011	11:52:31 PM	SiCl4 post valve closed
12/2/2011	11:52:31 PM	Main Vac valve closed
12/2/2011	11:52:31 PM	Bypass valve closed
12/2/2011	11:52:31 PM	Bubbler valve closed
12/2/2011	11:52:31 PM	H2 valve opened
12/2/2011	11:52:31 PM	Helium MFC set to  0.000000
12/2/2011	11:52:31 PM	H2 MFC set to  500.000000
12/2/2011	11:52:31 PM	BCl3 MFC set to  0.000000
12/2/2011	11:52:31 PM	PHl3 MFC set to  0.000000
12/2/2011	11:52:31 PM	SiCl4 MFC set to  0.000000
12/2/2011	11:52:31 PM	Bypass solenoid MFC set to  0.000000
12/2/2011	11:52:31 PM	Tube furnace set to 0
12/2/2011	11:53:38 PM	Helium valve closed
12/2/2011	11:53:38 PM	BCl3 valve closed
12/2/2011	11:53:38 PM	PH3 valve closed
12/2/2011	11:53:38 PM	SiCl4 pre valve closed
12/2/2011	11:53:38 PM	SiCl4 post valve closed
12/2/2011	11:53:38 PM	Main Vac valve closed
12/2/2011	11:53:38 PM	Bypass valve closed
12/2/2011	11:53:38 PM	H2 valve opened
12/2/2011	11:53:38 PM	Bubbler valve opened
12/2/2011	11:53:38 PM	Helium MFC set to  0.000000
12/2/2011	11:53:38 PM	H2 MFC set to  500.000000
12/2/2011	11:53:38 PM	BCl3 MFC set to  0.000000
12/2/2011	11:53:38 PM	PHl3 MFC set to  0.000000
12/2/2011	11:53:38 PM	SiCl4 MFC set to  0.000000
12/2/2011	11:53:38 PM	Bypass solenoid MFC set to  0.000000
12/2/2011	11:53:38 PM	Tube furnace set to 0
12/2/2011	11:53:39 PM	Helium valve closed
12/2/2011	11:53:39 PM	BCl3 valve closed
12/2/2011	11:53:39 PM	PH3 valve closed
12/2/2011	11:53:39 PM	SiCl4 pre valve closed
12/2/2011	11:53:39 PM	SiCl4 post valve closed
12/2/2011	11:53:39 PM	Main Vac valve closed
12/2/2011	11:53:39 PM	Bypass valve closed
12/2/2011	11:53:39 PM	H2 valve opened
12/2/2011	11:53:39 PM	Bubbler valve opened
12/2/2011	11:53:39 PM	Helium MFC set to  0.000000
12/2/2011	11:53:39 PM	H2 MFC set to  500.000000
12/2/2011	11:53:39 PM	BCl3 MFC set to  0.000000
12/2/2011	11:53:39 PM	PHl3 MFC set to  0.000000
12/2/2011	11:53:39 PM	SiCl4 MFC set to  0.000000
12/2/2011	11:53:39 PM	Bypass solenoid MFC set to  0.000000
12/2/2011	11:53:40 PM	Tube furnace set to 1000
